Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
Description Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
The MFC1000, use of packaging technology makes it possible to measure different ranges of flow under the same pipe diameter, and mass production ensures high ridiculousness, high performance and low cost.
Products calibrated with air are switched to argon, carbon dioxide, oxygen or carbon monoxide (laughing gas) by the gas selection command.
A wide range of applications, one set to handle multiple working conditions. Gas medium: air, nitrogen, oxygen, argon, hydrogen, carbon dioxide, and other dry, clean and non-corrosive gases
Technical Specification Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
| Data | Numerical value |
| Measuring Range | 20 / 50 / 100 / 200 / 500 / 1000 sccm, 2 / 5 / 10/ 20/50SLPM |
| Accuracy (under calibration condition *) | +-(1.5% +0.5%FS) |
| Repeatability | +-0.5%FS |
| Zero drift full range drift | 0.5%FS/ Year |
| Working range range adjustable ratio | 100:1 |
| Maximum controllable flow | 102%FS |
| Typical response time | 100MS |
| Start up time | 70MS |
| Working temperature | 0-+50℃ |
| * Temperature drift: with the calibration temperature S0℃ each time of difference, accuracy increased 0.12% |
| Product model | Full range pressure loss vented to atmosphere | The equipment size mm3 | Pipe connection |
| MFC1000-20/50sccm | 200Pa | 63.5*66.5*22.5 | 1/8”NPT female |
| MFC1000-100/200sccm | 1000Pa |
| MFC1000-500/1000sccm | 1000Pa |
| MFC1000-2/5SLPM | 5kPa | 70.5*74.2*26.0 | 3/8”NPT female |
| MFC1000-10/20SLPM | 35kPa | |
| MFC1000-50SLPM | 50kPa | 101.5*68.5*35.0 | 3/8”NPT female |
Dimension Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
Max Allowable working pressure Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
The maximum allowable working pressure:
MFc1000.20/50/100/200/500/1000sccm:2/5sLpM:145psig(1Mpa) MFc1000.10/20/50sLpM:59psig(0"4Mpa)
If the pipeline pressure is higher than the maximum working pressure, please add a pressure regulator at the front of the air inlet to adjust the pressure below the maximum working pressure.
Order Guide Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
Installation Precautions & Pipe Connection Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
Installation Precautions
Insrtal MFc1000The hole at the bottom of the series mass flow controller is used for equipment installation and fixation, the thread size is M3. No straight pipe segment is required for the inlet or outlet pipes of the device.
Pipe connection
Ensure that the air flows in the same direction as the arrow on the device.
The inlet and outlet sizes of the equipment (connected to the process system) are 1/8 "NpT or 3/8"NpT female threads.
We recommend that you use teflon tape wound seal to prevent thread leakage.
Do not entangle the raw material belt on the two threads nearest to the equipment body, so as to minimize the possibility of the raw material belt being involved in the equipment body.
Do not use paint or sealants at the connection between equipment and process piping. Such compounds entering the equipment body will cause permanent damage to the mass flow controller.When replacing the joint, please carefully clean the residual raw tape and debris of the thread orifice.
Application Hydrogen Oxygen Vacuum coating machine Gas mass flow controller for air
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